Metal and polySi (Ge) micromechanical devices for high frequency applications
نویسندگان
چکیده
In the current communications market, there exists a great demand for devices, which function as passive signal processing units. High performance and small size are identified to be the bottlenecks to meet market demand in communications area[1,3]. MEMS or micromachining technology can yield small, low weight and high performance components to replace the currently used off-chip components. This paper describes the micromechanical devices currently under intense research at IMEC. These include RF-MEMS switches, tuneable capacitors, MEMS resonators and their derived units such as bandpass filters etc. Micro mechanical resonators are realised using polySi (and poly SiGe ) surface micromachining and RF-MEMS components are realised from metal surface micromachining technology. Keywords— RF-MEMS, switch , micromechanical resonators.
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